Novel patterning of flexible and transparent Ag nanowire electrodes using oxygen plasma treatment
| Autor: | Byungil Hwang, Stefan Becker, Ji-Seon Kim, Hoijoon Kim, Hyoungsub Kim, Lee Giseok |
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| Rok vydání: | 2018 |
| Předmět: |
Technology
Materials science Fabrication Materials Science LIGHT-EMITTING-DIODES FABRICATION Nanowire Materials Science Multidisciplinary 02 engineering and technology Photoresist CONDUCTORS 010402 general chemistry 01 natural sciences Physics Applied METAL-ELECTRODE law.invention SILVER-NANOWIRE law Materials Chemistry Electrical conductor Science & Technology business.industry Physics Transistor General Chemistry 021001 nanoscience & nanotechnology NETWORKS 0104 chemical sciences Physical Sciences Electrode Oxygen plasma Optoelectronics 0210 nano-technology business FILM Light-emitting diode |
| Zdroj: | Journal of Materials Chemistry C. 6:9394-9398 |
| ISSN: | 2050-7534 2050-7526 |
| DOI: | 10.1039/c8tc02377h |
| Popis: | We report a novel patterning method using oxygen plasma treatment for flexible and transparent Ag nanowire electrodes. Using a dry film photoresist as a solid-state film-type photoresist, Ag nanowires were selectively oxidized under oxygen plasma treatment. Microstructural analysis revealed that the Ag nanowires were fully oxidized after 30 s of oxygen plasma treatment, which was also reflected in the changes in the optoelectronic properties of the Ag nanowires. The fully oxidized Ag nanowires could be completely dissolved in NH3 solution (aq.), without using a toxic etchant to form sharp patterns of Ag nanowire electrodes. To further confirm the applicability of the patterning technique demonstrated here in electronic devices, MoS2 thin-film transistors (TFTs) with patterned Ag-nanowire source/drain (S/D) electrodes were fabricated and they showed similar performances to typical MoS2 TFTs with thin-film-type Ti/Au S/D electrodes. |
| Databáze: | OpenAIRE |
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