3D Silicon Nanophotonics
| Autor: | Diana Grishina |
|---|---|
| Přispěvatelé: | Vos, Willem L., Faculty of Science and Technology, Complex Photonic Systems |
| Jazyk: | angličtina |
| Rok vydání: | 2017 |
| Předmět: |
Silicon
DRIE Materials science Lithography Nanophotonics chemistry.chemical_element Nanotechnology Etch mask Nanofabrication X-ray Photonic crystals Nanopores FIB Etching (microfabrication) Deep reactive-ion etching Tomography Photonic crystal RIE business.industry optics UV Nanolithography Photonics chemistry Etching business 3D |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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