Electron Bessel beam diffraction for precise and accurate nanoscale strain mapping
| Autor: | Christoph Mahr, Jo Verbeeck, Armand Béché, Andreas Rosenauer, Wannes Ghielens, Giulio Guzzinati, Toon Calders |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2019 |
| Předmět: |
Diffraction
Materials science Physics and Astronomy (miscellaneous) Measure (physics) FOS: Physical sciences 02 engineering and technology Electron 01 natural sciences symbols.namesake Optics 0103 physical sciences Sensitivity (control systems) Nanoscopic scale 010302 applied physics Condensed Matter - Materials Science business.industry Physics Resolution (electron density) Materials Science (cond-mat.mtrl-sci) 021001 nanoscience & nanotechnology Bessel beam symbols 0210 nano-technology business Bessel function Optics (physics.optics) Physics - Optics |
| Zdroj: | Applied physics letters |
| ISSN: | 0003-6951 |
| Popis: | Strain has a strong effect on the properties of materials and the performance of electronic devices. Their ever shrinking size translates into a constant demand for accurate and precise measurement methods with very high spatial resolution. In this regard, transmission electron microscopes are key instruments thanks to their ability to map strain with sub-nanometer resolution. Here we present a novel method to measure strain at the nanometer scale based on the diffraction of electron Bessel beams. We demonstrate that our method offers a strain sensitivity better than $2.5 \cdot 10^{-4}$ and an accuracy of $1.5 \cdot 10^{-3}$, competing with, or outperforming, the best existing methods with a simple and easy to use experimental setup. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Appl. Phys. Lett. 114, 243501 (2019) and may be found at https://aip.scitation.org/doi/abs/10.1063/1.5096245 Data available at: https://doi.org/10.5281/zenodo.2566137 and code available at: https://bitbucket.org/lutosensis/tem-thesis/src |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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