Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures
| Autor: | Yao-Joe Yang, Wen-Cheng Kuo, Hsin-Hung Liao, Fu-Wei Lee, Cheng-Wen Ma |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2015 |
| Předmět: |
Engineering
Silicon Digital-to-analog converter chemistry.chemical_element digital-to-analog converter lcsh:Chemical technology Biochemistry Displacement (vector) Article Analytical Chemistry law.invention chemistry.chemical_compound Parylene law lcsh:TP1-1185 micromirror Electrical and Electronic Engineering Instrumentation electrostatic microactuators Microelectromechanical systems One half White light interferometry business.industry parylene Electrical engineering Atomic and Molecular Physics and Optics chemistry microelectromechanical systems Optoelectronics white-light interferometry business Voltage |
| Zdroj: | Sensors (Basel, Switzerland) Sensors Volume 15 Issue 9 Pages 21567-21580 Sensors, Vol 15, Iss 9, Pp 21567-21580 (2015) |
| ISSN: | 1424-8220 |
| Popis: | We propose an electrostatically-actuated microelectromechanical digital-to-analog converter (M-DAC) device with low actuation voltage. The spring structures of the silicon-based M-DAC device were monolithically fabricated using parylene-C. Because the Young’s modulus of parylene-C is considerably lower than that of silicon, the electrostatic microactuators in the proposed device require much lower actuation voltages. The actuation voltage of the proposed M-DAC device is approximately 6 V, which is less than one half of the actuation voltages of a previously reported M-DAC equipped with electrostatic microactuators. The measured total displacement of the proposed three-bit M-DAC is nearly 504 nm, and the motion step is approximately 72 nm. Furthermore, we demonstrated that the M-DAC can be employed as a mirror platform with discrete displacement output for a noncontact surface profiling system. |
| Databáze: | OpenAIRE |
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