Low voltage actuated plate for haptic applications with PZT thin-film
| Autor: | Emmanuel Defay, B. Semail, J S Danel, M. Amberg, Christel Dieppedale, G. Le Rhun, M. Gorisse, S. Fanget, Philippe Renaux, Pascal Ancey, Skandar Basrour, Arnaud Devos, Y. Civet, Cedrick Chappaz, Fabrice Casset |
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| Přispěvatelé: | Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF) |
| Rok vydání: | 2013 |
| Předmět: |
010302 applied physics
Materials science Interface (computing) Mechanical engineering 02 engineering and technology Substrate (printing) Particle displacement 021001 nanoscience & nanotechnology 01 natural sciences GeneralLiterature_MISCELLANEOUS Finite element method Resonator 0103 physical sciences Electronic engineering 0210 nano-technology Low voltage ComputingMethodologies_COMPUTERGRAPHICS Haptic technology Voltage |
| Zdroj: | Proceedings of 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, 2013, Barcelona, Spain. paper Th3A.003, 2733-2736, ⟨10.1109/Transducers.2013.6627371⟩ |
| Popis: | The tremendous development of tactile interface in many customers' applications, such as smartphone, leads industrials to study “haptic interfaces” which allow the user to interact with its environment by the sense of touch. This paper reports on the development of a unique solution based on Pb(Zr0.52,Ti0.48)O3 (PZT) thin-film actuated plates allowing the feeling of textured surfaces playing with the variable friction between a finger and the plate resonator induced by squeeze-film effect. Through a Finite Element Method (FEM) study, we designed high performances PZT actuator in order to obtain haptic compatible substrate displacement amplitude of about 1μm using actuation voltage lower than 10V. We used a generic technology to build demonstrators. Finally, we proved the concept through first promising electromechanical characterization results. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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