Smoothing the surface roughness of aluminum nitride films obtained by magnetron sputtering

Autor:	L. V. Baranova, V. I. Strunin
Rok vydání:	2021
Předmět:	History Materials science chemistry Aluminium Surface roughness chemistry.chemical_element Composite material Nitride Sputter deposition Smoothing Computer Science Applications Education
Zdroj:	Journal of Physics: Conference Series. 1791:012034
ISSN:	1742-6596 1742-6588
Popis:	When producing aluminum nitride films used in radio electronic devices on bulk (BAW) and surface acoustic waves (SAW), such as resonators, filters, sensors, by magnetron sputtering, a problem arises due to the large surface roughness of the films, as a result of which acoustic waves scatter on irregularities and, as a result, deterioration of the resonance characteristics of the devices. In this paper, we study the possibility of improving the surface quality of aluminum nitride films by smoothing the surface roughness upon irradiation with a beam of cluster argon ions. It is shown that the effect of low-energy (10 V/atom) argon cluster ions leads to surface modification, removal of residual chemical contaminants in the near-surface layer, and additional smoothing of the film surface at an ultra-small thickness of the etched layer (
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::eb39713abbedcb6d9a008223749e3a4d https://doi.org/10.1088/1742-6596/1791/1/012034 Zobrazit plný text záznamu