Passive and chipless packaged sensor for the wireless pressure monitoring in harsh environment
Autor: | J. Philippe, Hervé Aubert, Dominique Henry, Cristina Arenas, Patrick Pons, Anthony Coustou, Alexandre Rumeau |
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Přispěvatelé: | Équipe MIcro et Nanosystèmes pour les Communications sans fil (LAAS-MINC), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Service Instrumentation Conception Caractérisation (LAAS-I2C), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT) |
Jazyk: | angličtina |
Rok vydání: | 2017 |
Předmět: |
Engineering
Bar (music) Acoustics lcsh:A 02 engineering and technology Photoresist 01 natural sciences passive sensor law.invention chipless sensor Planar law 0202 electrical engineering electronic engineering information engineering Electronic engineering pressure sensor Radar [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics radar reader business.industry Electro-optical sensor 010401 analytical chemistry 020206 networking & telecommunications Pressure sensor 0104 chemical sciences Transducer lcsh:General Works business Sensitivity (electronics) |
Zdroj: | Eurosensors Eurosensors, Sep 2017, Paris, France. 3p Proceedings, Vol 1, Iss 4, p 629 (2017) |
Popis: | International audience; A new millimetre-wave passive and chipless packaged sensor for wireless pressure monitoring in harsh environment is proposed. This sensor uses a planar microstrip resonator coupled with a high resistivity silicon membrane. The remote interrogation of this sensor is performed from a Frequency-Modulated Continuous-Wave (FMCW) radar. Prototypes have been designed and fabricated using photoresist intermediate layer for the silicon membrane bonding. Radar measurements on two sensors validate a 6dB full-scale response for 1.4 bar overpressure. Depression measurements demonstrate the transducer hermeticity and a measured sensitivity of 1.6% per bar on the millimetre-wave resonant frequency. |
Databáze: | OpenAIRE |
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