A novel method of silicon synthesis by CVD
Autor: | V. S. Kudyakova, R. A. Shishkin, Yu. V. Yuferov, F. M. Zykov |
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Jazyk: | angličtina |
Rok vydání: | 2019 |
Předmět: |
inorganic chemicals
Materials science Silicon Grog Monofluoride technology industry and agriculture chemistry.chemical_element equipment and supplies complex mixtures chemistry.chemical_compound stomatognathic diseases chemistry Chemical engineering Aluminium Nanofiber visual_art visual_art.visual_art_medium Selective reduction Fiber Silicon oxide |
Zdroj: | AIP Conf. Proc. AIP Conference Proceedings |
Popis: | Silicon fibers were synthesized by a novel CVD method including in the interaction of aluminum monofluoride with silicon oxide, the final product containing nanofibers in an amount of 15 wt. %. The possibility of selective reduction of silicon oxide from the chamotte refractory plate was also demonstrated. Si was characterized by SEM and XRD. Thermodynamics and mechanism of silicon fiber formation were also considered. © 2019 Author(s). |
Databáze: | OpenAIRE |
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