Cyclic evolution of the electron temperature and density in dusty low-pressure radio frequency plasmas with pulsed injection of hexamethyldisiloxane
Autor: | Kremena Makasheva, Richard Clergereaux, Luc Stafford, Vincent Garofano, Bernard Despax |
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Přispěvatelé: | Université de Montréal (UdeM), LAboratoire PLasma et Conversion d'Energie (LAPLACE), Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées, Matériaux et Procédés Plasmas (LAPLACE-MPP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse III - Paul Sabatier (UT3) |
Jazyk: | angličtina |
Rok vydání: | 2015 |
Předmět: |
010302 applied physics
Electron density Hexamethyldisiloxane Argon Physics and Astronomy (miscellaneous) [SPI.PLASMA]Engineering Sciences [physics]/Plasmas chemistry.chemical_element Electron 01 natural sciences 010305 fluids & plasmas Ion chemistry.chemical_compound [SPI]Engineering Sciences [physics] chemistry Physics::Plasma Physics 0103 physical sciences Astrophysics::Solar and Stellar Astrophysics Electron temperature Plasma diagnostics Emission spectrum Atomic physics Astrophysics::Galaxy Astrophysics ComputingMilieux_MISCELLANEOUS |
Zdroj: | Applied Physics Letters Applied Physics Letters, American Institute of Physics, 2015, 107 (18), pp.183104. ⟨10.1063/1.4935030⟩ |
ISSN: | 0003-6951 |
Popis: | Optical emission spectroscopy was used to analyze the very-low-frequency cyclic evolution of the electron energy and density caused by repetitive formation and loss of dust nanoparticles in argon plasmas with pulsed injection of hexamethyldisiloxane (HMDSO, [CH3]6Si2O). After elaborating a Boltzmann diagram for Ar high-lying levels and a collisional-radiative model for Ar 2p (Paschen notation) states, temperatures characterizing the low- and high-energy parts of the electron population were calculated. Relative electron densities were also estimated from relative line emission intensities. Both temperatures increase when the dust occupation increases, and then decrease when dust is lost. The opposite trend was observed for the electron density. Such cyclic behaviors of the electron energy and electron density in the HMDSO-containing plasmas are in good agreement with the evolution processes in dusty plasmas, in which the formation of negative ions followed by an electron attachment on the surfaces of the nanoparticles is a critical phenomenon driving dust growth. |
Databáze: | OpenAIRE |
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