Autor:	F. Merat, M. Mehregany
Předmět:	Microelectromechanical systems Materials science business.industry Physics::Optics Integrated circuit law.invention Semiconductor laser theory Optics law Optoelectronics Micro-Opto-Electro-Mechanical Systems Optical filter business Diffraction grating Infrared cut-off filter Tunable laser
Zdroj:	Scopus-Elsevier
Popis:	We describe progress in the development of micro-optomechanical components which are compatible with MEMS and integrated circuit processing. Devices which have been developed include polygon and diffraction grating scanners, tunable laser diodes, tunable IR filters, and optical waveguides.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ea48cfa88a43fbd7e60e43e446a7cf91 http://www.scopus.com/inward/record.url?eid=2-s2.0-0029717146&partnerID=MN8TOARS Zobrazit plný text záznamu