Journal of Applied Physics
| Autor: | Andrew Daigle, Yajie Chen, Xiaodong Su, Bolin Hu, Vincent G. Harris, Dwight D. Viehland, Scott M. Gillette, Aria F. Yang, Anton L. Geiler, Zhiguang Wang, Trifon Fitchorov |
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| Přispěvatelé: | Materials Science and Engineering (MSE), Virginia Tech. Department of Materials Science and Engineering, Northeastern University. Center for Microwave Magnetic Materials and Integrated Circuits, Northeastern University. Department of Electrical and Computer Engineering, Soochow University. Department of Physics. Jiangsu Key Laboratory of Thin Films |
| Jazyk: | angličtina |
| Rok vydání: | 2012 |
| Předmět: |
Piezoelectric transducers
Materials science business.industry Scanning electron microscope PZT films Thin films Piezoelectric fields General Physics and Astronomy Heterojunction Epitaxy Pulsed laser deposition Amorphous solid Crystal Optics Heterojunctions Optoelectronics Thin film business Layer (electronics) |
| Popis: | Piezoelectric films of Pb(Zr0.53Ti0.47)O-3 (PZT) were deposited by pulsed laser deposition onto metallic magnetostrictive substrates. In order to optimize the growth of PZT films, a buffer layer of Pt was employed, as well as variation of deposition temperature, pressure, and laser energy. Room temperature 0-20 x-ray diffraction measurements indicate all diffraction features correspond to reflections indexed to a single PZT phase of space group P4mm. Scanning electron microscopy images reveal pinhole-free dense films of pyramidal shaped crystal arrangements whose orientation and size were controlled by variation of oxygen pressures during deposition. The resulting PZT films had a value of d(33) similar to 46 pm/V representing a 53% increase over previous efforts to realize a piezoelectric/Metglas (TM) film heterostructure. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3697605] |
| Databáze: | OpenAIRE |
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