Development of QCM Humidity Sensors Using Anodized Alumina Film
| Autor: | Nobuo Yamamoto, Tomiharu Yamaguchi, Kazuhiro Hara |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Materials science Computer Networks and Communications Anodizing Applied Mathematics Anodic oxidation Mechanical Engineering General Physics and Astronomy chemistry.chemical_element Humidity 020206 networking & telecommunications 02 engineering and technology Quartz crystal microbalance 01 natural sciences Chemical engineering chemistry Aluminium 0103 physical sciences Signal Processing 0202 electrical engineering electronic engineering information engineering Electrical and Electronic Engineering Composite material |
| Zdroj: | IEEJ Transactions on Sensors and Micromachines. 139:296-302 |
| ISSN: | 1347-5525 1341-8939 |
| DOI: | 10.1541/ieejsmas.139.296 |
| Popis: | Humidity sensors based on QCM (quartz crystal microbalance) have been developed using an anodized alumina thin‐film as a sensing material. An aluminum thin‐film is deposited on a silver‐co... |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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