Micromachined High Frequency 1–3 Piezocomposite Transducer Using Picosecond Laser
| Autor: | Xinle Zhu, Xiaohua Jian, Zhangjian Li, Yaoyao Cui, Jiabing Lv, Xu Jie, Ninghao Wang, Zhile Han |
|---|---|
| Rok vydání: | 2021 |
| Předmět: |
Electromechanical coupling coefficient
Fabrication Laser ablation Materials science Acoustics and Ultrasonics business.industry 01 natural sciences Imaging phantom Surface micromachining Transducer Etching (microfabrication) 0103 physical sciences Optoelectronics Ultrasonic sensor Electrical and Electronic Engineering business 010301 acoustics Instrumentation |
| Zdroj: | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 68:2219-2226 |
| ISSN: | 1525-8955 0885-3010 |
| DOI: | 10.1109/tuffc.2021.3059942 |
| Popis: | In this article, a PZT/Epoxy 1-3 piezoelectric composite based on picosecond laser etching technology is developed for the fabrication of high-frequency ultrasonic transducer. The design, fabrication, theoretical analysis, and performance of the piezocomposite and transducer are presented and discussed. According to the test results, the area of the PZT pillar is $20.5\mu \text{m}\,\,\times 20.5\,\,\mu \text{m}$ , the average width of the kerf is $4.5~\mu \text{m}$ , and the thickness of the piezocomposite is $38~\mu \text{m}$ . The fabricated 1-3 piezocomposite has a resonant frequency of 46.5 MHz, a parallel resonant frequency of 65 MHz, and an electromechanical coupling coefficient of 0.73. According to the wires phantom imaging, its imaging resolution can reach $50~\mu \text{m}$ . This study shows that the proposed picosecond laser micromachining technique can be applied in the fabrication of high frequency 1-3 piezocomposite and transducer. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|