Noise analysis for through-focus scanning optical microscopy
| Autor: | Ravikiran Attota |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
Microscopy
Optical Phenomena business.industry Noise (signal processing) Computer science Image processing 02 engineering and technology TSOM Signal-To-Noise Ratio 021001 nanoscience & nanotechnology 01 natural sciences Atomic and Molecular Physics and Optics Article Metrology 010309 optics Optical phenomena Optics 0103 physical sciences 0210 nano-technology business Focus (optics) Image resolution |
| Zdroj: | Optics letters. 41(4) |
| ISSN: | 1539-4794 |
| Popis: | A systematic noise-analysis study for optimizing data collection and data processing parameters for through-focus scanning optical microscopy (TSOM) is presented. TSOM is a three-dimensional shape metrology method that can achieve sub-nanometer measurement sensitivity by analyzing sets of images acquired through focus using a conventional optical microscope. We show that the best balance between signal-to-noise performance and acquisition time can be achieved by judicious spatial averaging. Correct background-signal subtraction of the imaging system inhomogeneities is also critical, as well as careful alignment of the constituent images in the case of differential TSOM analysis. |
| Databáze: | OpenAIRE |
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