Characterization of a PiezoMUMPs Microsensor for Contactless Measurements of DC Electrical Current
| Autor: | Bruno Ando, Salvatore Baglio, Carlo Trigona, Giuseppa Crea, Valentina Sinatra |
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| Rok vydání: | 2020 |
| Předmět: |
Microelectromechanical systems
dc sensing Materials science business.industry self-generating MEMS 020208 electrical & electronic engineering 02 engineering and technology Inductor Signal Piezoelectricity PiezoMUMPs Characterization (materials science) Contactless measurements Electrical current microsensor Hardware_GENERAL 0202 electrical engineering electronic engineering information engineering Optoelectronics Electrical and Electronic Engineering business Polarization (electrochemistry) Instrumentation Voltage |
| Zdroj: | IEEE Transactions on Instrumentation and Measurement. 69:1387-1396 |
| ISSN: | 1557-9662 0018-9456 |
| DOI: | 10.1109/tim.2019.2908510 |
| Popis: | This paper presents an integrated sensor able to perform contactless measurements of dc electrical current. The microsensor conceived is based on the PiezoMUMPs technology which embeds a layer of piezoelectric material thus offering a mechanoelectric transduction of the measurand: the dc electrical current flowing into a wire external to the microsensor is here converted into a voltage signal without the need of auxiliary polarization signals or integrated inductors/coils as in the case electrostatic and electromagnetic devices, respectively. A prototype of the MEMS device has been designed, modeled, numerically simulated, and then fabricated. A measurement campaign allowed validating the sensor and to characterize its performances. |
| Databáze: | OpenAIRE |
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