Clean integration of single-walled carbon nanotubes for electromechanical systems
| Autor: | Muoth, Matthias |
|---|---|
| Přispěvatelé: | Hierold, Christofer, Robertson, John |
| Jazyk: | angličtina |
| Rok vydání: | 2013 |
| Předmět: |
Electric engineering
NANOTUBES + CARBON NANOTUBES TRANSISTORS (ELECTRONICS) TRANSISTOREN (ELEKTRONIK) ddc:621.3 NANOELECTROMECHANICAL COMPONENTS NEMS (ELECTRICAL ENGINEERING) NANORÖHRCHEN + KOHLENSTOFFNANORÖHRCHEN NANOELEKTROMECHANISCHE BAUELEMENTE NEMS (ELEKTROTECHNIK) MICROELECTROMECHANICAL COMPONENTS MEMS (ELECTRICAL ENGINEERING) PHOTOLITHOGRAPHIE (PHOTOGRAPHIE) PHOTOLITHOGRAPHY (PHOTOGRAPHY) MIKROELEKTROMECHANISCHE BAUELEMENTE MEMS (ELEKTROTECHNIK) Engineering & allied operations ddc:620 |
| Zdroj: | Scientific Reports on Micro and Nanosystems, 16 |
| Popis: | Scientific Reports on Micro and Nanosystems, 16 ISBN:978-3-86247-358-8 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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