Resistivity humidity sensors based on hydrogenated amorphous carbon films
| Autor: | L. Nachez, B.J. Gómez, Carlos E. Repetto, Javier Epeloa, Ariel Dobry |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2019 |
| Předmět: |
Materials science
Recubrimientos y Películas Polymers and Plastics Metals and Alloys Humidity IMPEDANCE SPECTROSCOPY 02 engineering and technology INGENIERÍAS Y TECNOLOGÍAS 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences 0104 chemical sciences Surfaces Coatings and Films Electronic Optical and Magnetic Materials Dielectric spectroscopy Biomaterials purl.org/becyt/ford/2 [https] Amorphous carbon Electrical resistivity and conductivity Ingeniería de los Materiales THIN FILMS AMORPHOUS CARBON FILMS Composite material purl.org/becyt/ford/2.5 [https] 0210 nano-technology |
| Zdroj: | CONICET Digital (CONICET) Consejo Nacional de Investigaciones Científicas y Técnicas instacron:CONICET |
| DOI: | 10.1088/2053-1591/aaed7a |
| Popis: | We have studied the humidity dependence of the electrical properties in hydrogenated amorphous carbon (a-C:H) films. The films were prepared in two stages combining the techniques of physical deposition in vapor phase evaporation (PAVD) and plasma pulsed nitriding. They were deposited over printed circuit boards made of synthetic resin FR2, predesigned to measure DC and AC transport. The Raman spectrum showed a broad peak whose two components are characteristics of a-C:H. By treating the sample in N2-H2 plasma, the impedance became intrinsically sensitive to the relative humidity (RH) of the surrounding media. We observed that when RH increased, the electrical impedance (Z) of the films diminished. The complex impedance spectroscopy method was used to analyze the interaction between the water molecules and the a-C:H film. The main contribution to the humidity dependency of Z came from the resistivity component. The present work provides a fundamental support to develop humidity sensors based on the variation of the impedance of a-C:H films. Fil: Epeloa, Javier Eduardo. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina Fil: Repetto, Carlos Enrique. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina Fil: Gomez, Bernardo Jose Armando. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina Fil: Nachez, Juan Lucas. Universidade Federal Fluminense; Brasil. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina Fil: Dobry, Ariel Oscar. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Rosario. Instituto de Física de Rosario. Universidad Nacional de Rosario. Instituto de Física de Rosario; Argentina |
| Databáze: | OpenAIRE |
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