Design of an Einzel Lens with Square Cross-Section
| Autor: | Michał Krysztof |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
Materials science
TK7800-8360 Computer Networks and Communications Micropump law.invention miniaturization Optics law Miniaturization Einzel lens Electrical and Electronic Engineering Microelectromechanical systems business.industry Anode focusing of electron beam MEMS Hardware and Architecture Control and Systems Engineering microcolumn Signal Processing Cathode ray Electron microscope Electronics business Voltage |
| Zdroj: | Electronics Volume 10 Issue 19 Electronics, Vol 10, Iss 2338, p 2338 (2021) |
| ISSN: | 2079-9292 |
| DOI: | 10.3390/electronics10192338 |
| Popis: | In this paper, the results of modeling and simulation of a microcolumn are presented. The microcolumn is part of a developed miniature MEMS electron microscope equipped with a miniature MEMS high-vacuum micropump. Such an arrangement makes this device the first stand-alone miniature electron-optical device to operate without an external high-vacuum chamber. Before such a device can be fabricated, research on particular elements must be carried out to determine the working principles of the device. The results of the calculations described in this article help us to understand the work of a microcolumn with square holes in the electrodes. The formation of an electron beam spot at the anode is discussed. Further calculations and results show the dependence of the Einzel lens size on the electron beam spot diameter, electron beam current, and microcolumn focusing voltage. The results are used to define the optimal design of the developed MEMS electron microscope. |
| Databáze: | OpenAIRE |
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