Room-temperature-deposited dielectrics and superconductors for integrated photonics
| Autor: | Jeffrey M. Shainline, Sonia M. Buckley, Nima Nader, Cale M. Gentry, Kevin C. Cossel, Justin W. Cleary, Miloš Popović, Nathan R. Newbury, Sae Woo Nam, Richard P. Mirin |
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| Rok vydání: | 2017 |
| Předmět: |
Materials science
business.industry Detector Physics::Optics 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Atomic and Molecular Physics and Optics law.invention Supercontinuum 010309 optics Resonator law 0103 physical sciences Optoelectronics Stepper Photonics 0210 nano-technology business Lithography Waveguide Beam splitter |
| Zdroj: | Optics express. 25(9) |
| ISSN: | 1094-4087 |
| Popis: | We present an approach to fabrication and packaging of integrated photonic devices that utilizes waveguide and detector layers deposited at near-ambient temperature. All lithography is performed with a 365 nm i-line stepper, facilitating low cost and high scalability. We have shown low-loss SiN waveguides, high-$Q$ ring resonators, critically coupled ring resonators, 50/50 beam splitters, Mach-Zehnder interferometers (MZIs) and a process-agnostic fiber packaging scheme. We have further explored the utility of this process for applications in nonlinear optics and quantum photonics. We demonstrate spectral tailoring and octave-spanning supercontinuum generation as well as the integration of superconducting nanowire single photon detectors with MZIs and channel-dropping filters. The packaging approach is suitable for operation up to 160 \degree C as well as below 1 K. The process is well suited for augmentation of existing foundry capabilities or as a stand-alone process. |
| Databáze: | OpenAIRE |
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