Scanning capacitance microscopy investigations of buried heterostructure laser structures
| Autor: | M. Hammar, S. Nilsson, O. Bowallius, Srinivasan Anand, Gunnar Landgren |
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| Rok vydání: | 1999 |
| Předmět: |
Materials science
business.industry Scanning electron microscope General Physics and Astronomy Heterojunction Surfaces and Interfaces General Chemistry Scanning capacitance microscopy Condensed Matter Physics Laser Capacitance Surfaces Coatings and Films Semiconductor laser theory law.invention Optics law Metalorganic vapour phase epitaxy business |
| Zdroj: | Scopus-Elsevier |
| ISSN: | 0169-4332 |
| DOI: | 10.1016/s0169-4332(98)00784-3 |
| Popis: | In this work, InP-based buried heterostucture lasers are used to demonstrate the utility of scanning capacitance microscopy (SCM) for characterising complex device structures. The lasers use p-n ju ... |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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