SOI-based micro-mechanical terahertz detector operating at room-temperature and atmospheric pressure

Autor: Kevin Froberger, Benjamin Walter, Melanie Lavancier, Romain Peretti, Guillaume Ducournau, Jean-François Lampin, Marc Faucher, Stefano Barbieri
Přispěvatelé: Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Université catholique de Lille (UCL)-Université catholique de Lille (UCL), Photonique THz - IEMN (PHOTONIQUE THZ - IEMN), Université catholique de Lille (UCL)-Université catholique de Lille (UCL)-Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Vmicro SAS (Vmicro), Nano and Microsystems - IEMN (NAM6 - IEMN), We acknowledge partial financial support from the French Renatech network, Nord-Pas de Calais Regional Council (Grant STARS-ATENA), Fonds Européens de Développement Régional, and CPER 'Photonics for Society.', Renatech Network
Rok vydání: 2022
Předmět:
Zdroj: Applied Physics Letters
Applied Physics Letters, 2022, 120 (26), pp.261103. ⟨10.1063/5.0095126⟩
ISSN: 1077-3118
0003-6951
Popis: International audience; We present a micro-mechanical terahertz (THz) detector fabricated on a silicon on insulator substrate and operating at room-temperature. The device is based on a U-shaped cantilever of micrometric size, on top of which two aluminum half-wave dipole antennas are deposited. This produces an absorption extending over the [Formula: see text] THz frequency range. Due to the different thermal expansion coefficients of silicon and aluminum, the absorbed radiation induces a deformation of the cantilever, which is read out optically using a 1.5 μm laser diode. By illuminating the detector with an amplitude modulated, 2.5 THz quantum cascade laser, we obtain, at room-temperature and atmospheric pressure, a responsivity of [Formula: see text] for the fundamental mechanical bending mode of the cantilever. This yields noise-equivalent-power of [Formula: see text] at 2.5 THz. Finally, the low mechanical quality factor of the mode grants a broad frequency response of approximately 150 kHz bandwidth, with a thermal response time of ∼ 2.5 μs.
Databáze: OpenAIRE
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