Synthesis of arbitrary pulse waveforms in QCL-seeded ns-pulse COsub2/sublaser for optimization of an LPP EUV source
| Autor: | Junichi Fujimoto, Hakaru Mizoguchi, Yoshiaki Kurosawa, Hiroaki Nakarai, Yasufumi Kawasuji, Saito Takashi, Krzysztof M. Nowak, Takashi Suganuma |
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| Rok vydání: | 2016 |
| Předmět: |
Physics
business.industry Extreme ultraviolet lithography Pulse duration 02 engineering and technology Injection seeder 021001 nanoscience & nanotechnology 01 natural sciences Atomic and Molecular Physics and Optics Pulse (physics) 010309 optics Optics Regenerative amplification Extreme ultraviolet 0103 physical sciences TopHat 0210 nano-technology business Inertial confinement fusion |
| Zdroj: | Optics letters. 41(13) |
| ISSN: | 1539-4794 |
| Popis: | One of the unique features of the quantum-cascade-laser-seeded, nanosecond-pulse COsub2/sublaser, invented for the purpose of generation of extreme UV by laser-produced-plasma, is a robust synthesis of arbitrary pulse waveforms. In the present Letter we report on experimental results that are, to our best knowledge, the first demonstration of such functionality obtainable from nanosecond-pulse COsub2/sublaser technology. An online pulse duration adjustment within 10-40 ns was demonstrated, and a few exemplary pulse waveforms were synthesized, such as "tophat," "tailspike," and "leadspike" shapes. Such output characteristics may be useful to optimize the performance of LPP EUV source. |
| Databáze: | OpenAIRE |
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