Detection of ultrathin SiC layers by infrared spectroscopy. Simulation and experiment

Autor:	B. Mainz, S. Morley, Marion Friedrich, S. Deutschmann, V. Offermann, Dietrich R. T. Zahn
Předmět:	Optics business.industry Chemistry Infrared spectroscopy Optoelectronics Condensed Matter Physics business Electronic Optical and Magnetic Materials
Zdroj:	Scopus-Elsevier
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e4b8d44c71c7e47321cae63232b3fbc2 http://www.scopus.com/inward/record.url?eid=2-s2.0-0028526876&partnerID=MN8TOARS Zobrazit plný text záznamu