Dipole-source localization using biomimetic flow-sensor arrays positioned as lateral-line system
| Autor: | Gijsbertus J.M. Krijnen, A.M.K. Dagamseh, Theodorus S.J. Lammerink, Remco J. Wiegerink, C.M. Bruinink, M.L. Kolster |
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| Rok vydání: | 2010 |
| Předmět: |
Materials science
Physics::Instrumentation and Detectors Capacitive sensing Flow sensors Discrete Fourier transform Artificial lateral-line Optics Calibration Electrical and Electronic Engineering Instrumentation Microelectromechanical systems Pixel business.industry TST-Life like Resolution (electron density) EWI-18544 Metals and Alloys Condensed Matter Physics Subpixel rendering IR-73658 Surfaces Coatings and Films Electronic Optical and Magnetic Materials Vibration isolation METIS-271055 business Source localization |
| Zdroj: | Sensors and actuators. A: Physical, 162(2), 355-360. Elsevier |
| ISSN: | 0924-4247 |
| Popis: | In-plane linear displacements of microelectromechanical systems are measured with subnanometer accuracy by observing the periodic micropatterns with a charge-coupled device camera attached to an optical microscope. The translation of the microstructure is retrieved from the video by phase-shift computation using discrete Fourier transform analysis. This approach is validated through measurements on silicon devices featuring steep-sided periodic microstructures. The results are consistent with the electrical readout of a bulk micromachined capacitive sensor, demonstrating the suitability of this technique for both calibration and sensing. Using a vibration isolation table, a standard deviation of σ = 0.13 nm could be achieved, enabling a measurement resolution of 0.5 nm (4σ) and a subpixel resolution better than 1/100 pixel. [2010-0170] |
| Databáze: | OpenAIRE |
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