Simultaneous detection of positive and negative secondary ions
| Autor: | Graham A. Cooke, Richard J. Chater, Alan J. Smith |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
Static secondary-ion mass spectrometry
Technology Materials science Ion beam Analytical chemistry 02 engineering and technology Mass spectrometry 01 natural sciences Focused ion beam 0901 Aerospace Engineering Ion Physics Applied Engineering Sputtering Physics::Plasma Physics 0103 physical sciences Materials Chemistry Electrical and Electronic Engineering Nanoscience & Nanotechnology 0912 Materials Engineering Instrumentation Applied Physics 010302 applied physics Science & Technology Process Chemistry and Technology Physics Engineering Electrical & Electronic MASS-SPECTROMETRY 021001 nanoscience & nanotechnology Surfaces Coatings and Films Electronic Optical and Magnetic Materials Secondary ion mass spectrometry Physical Sciences Mass spectrum Science & Technology - Other Topics 0401 Atmospheric Sciences 0210 nano-technology SIMS |
| Popis: | A secondary ion mass spectrometer (SIMS) instrument is described that is configured with two SIMSdetectors that are both low-field extraction, quadrupole-based filters. Secondary ions are generated by sputtering with a liquid-metal ion gallium source and column of the type that is common on two-beam electron microscopes. The gallium ion beam, or focused ion beam achieves sub-100 nm focus with a continuous current of up to 300 pA. Positive secondary ions are detected by one SIMSdetector, and simultaneously, negative secondary ions are detected by the second SIMSdetector. The SIMSdetectors are independently controlled for recording mass spectra, concentration depth profiles, and secondary ion images. Examples of simultaneous positive and negative SIMS are included that demonstrate the advantage of this facility for surface analysis and depth profiling. The SIMS secondary ion collection has been modeled using the ray tracing program simion (“simion”, Scientific Instrument Services, Inc., Ringoes, NJ, 08551-1054, see http://www.simion.com) in order to understand the interaction of the secondary ions of opposite polarities in the extraction volume for the purpose of optimizing secondary ion collection. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|