An original apparatus for endurance testing of MEMS electrical contact materials
| Autor: | Jerome Delamare, Christophe Poulain, Patrick Rousset, Laurent Carbone, Christophe Lapiere, Laurent Chiesi, Maxime Vincent, Frédéric Houzé |
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| Přispěvatelé: | Laboratoire de génie électrique de Paris (LGEP), Université Paris-Sud - Paris 11 (UP11)-Université Pierre et Marie Curie - Paris 6 (UPMC)-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2009 |
| Předmět: |
Microelectromechanical systems
Materials science Plane (geometry) 020502 materials Contact resistance Mechanical engineering Nanotechnology 02 engineering and technology 021001 nanoscience & nanotechnology Curvature Electrical contacts Scanning probe microscopy 0205 materials engineering Vacuum chamber Nanoindenter 0210 nano-technology ComputingMilieux_MISCELLANEOUS |
| Zdroj: | Proceedings of the 55th Holm Conference on Electrical Contacts 55th Holm Conference on Electrical Contacts 55th Holm Conference on Electrical Contacts, Sep 2009, Vancouver, Canada. pp. 285-289 |
| Popis: | This paper presents a new experimental setup dedicated to the evaluation of contact materials for MEMS switches. The setup is an alternative way to more complex equipment like modified SPM or nanoindenter (1-4). It has been designed to test various contact materials upon electrical cycling, without requiring any specific micro-fabricated test vehicles. The setup is compact and housed in a vacuum chamber, which can be filled with gas mixtures to evaluate contact materials under various environmental conditions. The experimental contact is made of a commercial reed blade, contacting on a tip with a curvature radius of a few microns. It mimics a sphere/plane experimental contact, at a scale similar to MEMS switch micro- contacts. The two contact parts are easily removable, and can be covered with the appropriate contact material. Preliminary tests focused on lifetime evaluation of gold contacts under nitrogen. To validate the relevance of this setup, contact degradation is compared to the degradation modes we studied previously in a magnetic MEMS switch (5, 6). |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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