Comprehensive Study on the Kinetic Formation of the Orthorhombic Ferroelectric Phase in Epitaxial Y-Doped Ferroelectric HfO2 Thin Films

Autor:	Yuki Tashiro, Hiroshi Funakubo, Takao Shimizu, Takanori Mimura
Rok vydání:	2021
Předmět:	Materials science Condensed matter physics Phase (matter) Doping Materials Chemistry Electrochemistry Orthorhombic crystal system Thin film Epitaxy Kinetic energy Ferroelectricity Electronic Optical and Magnetic Materials
Zdroj:	ACS Applied Electronic Materials. 3:3123-3130
ISSN:	2637-6113
DOI:	10.1021/acsaelm.1c00342
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e1ea0c080432bb0eebe6cc44c320b507 https://doi.org/10.1021/acsaelm.1c00342 Zobrazit plný text záznamu