In Situ Formation of Nanoporous Silicon on a Silicon Wafer via the Magnesiothermic Reduction Reaction (MRR) of Diatomaceous Earth
| Autor: | Svetlana A. Lipovskikh, Yuliya Kan, Patrick Aggrey, Denis M. Zhigunov, Igor A. Salimon, Alexander M. Korsunsky, Sergey Yu. Luchkin, Bakhodur Abdusatorov, Alexey I. Salimon |
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| Jazyk: | angličtina |
| Rok vydání: | 2020 |
| Předmět: |
Materials science
Silicon General Chemical Engineering chemistry.chemical_element Substrate (electronics) Focused ion beam Article lcsh:Chemistry chemistry.chemical_compound symbols.namesake in situ processing General Materials Science Wafer Crystalline silicon nanoflakes Black silicon black silicon fractal structure diatomaceous earth magnesiothermic reduction reaction lcsh:QD1-999 chemistry Chemical engineering light absorption symbols Raman spectroscopy Layer (electronics) surface reflection |
| Zdroj: | Nanomaterials Volume 10 Issue 4 Nanomaterials, Vol 10, Iss 4, p 601 (2020) |
| ISSN: | 2079-4991 |
| Popis: | Successful direct route production of silicon nanostructures from diatomaceous earth (DE) on a single crystalline silicon wafer via the magnesiothermic reduction reaction is reported. The formed porous coating of 6 µ m overall thickness contains silicon as the majority phase along with minor traces of Mg, as evident from SEM-EDS and the Focused Ion Beam (FIB) analysis. Raman peaks of silicon at 519 cm&minus 1 and 925 cm&minus 1 were found in both the film and wafer substrate, and significant intensity variation was observed, consistent with the SEM observation of the directly formed silicon nanoflake layer. Microstructural analysis of the flakes reveals the presence of pores and cavities partially retained from the precursor diatomite powder. A considerable reduction in surface reflectivity was observed for the silicon nanoflakes, from 45% for silicon wafer to below 15%. The results open possibilities for producing nanostructured silicon with a vast range of functionalities. |
| Databáze: | OpenAIRE |
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