Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime
| Autor: | Alessandro Bertolini, Boris A. Boom, Johannes F. J. van den Brand, Eric Hennes |
|---|---|
| Přispěvatelé: | Grav. waves and fundamental physics, RS: FSE Grav. waves and fundamental physics |
| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
Materials science
Capacitive sensing Monte Carlo method chemistry.chemical_element gas damping 02 engineering and technology lcsh:Chemical technology 01 natural sciences Biochemistry Article Analytical Chemistry Free molecular flow 0103 physical sciences Gaseous diffusion lcsh:TP1-1185 Electrical and Electronic Engineering Instrumentation capacitance transducers Helium Q measurement Microelectromechanical systems Range (particle radiation) 010308 nuclear & particles physics Monte Carlo methods Mechanics 021001 nanoscience & nanotechnology Atomic and Molecular Physics and Optics free molecular flow Transducer chemistry 0210 nano-technology |
| Zdroj: | Sensors Volume 21 Issue 7 Sensors (Basel, Switzerland) Sensors, Vol 21, Iss 2566, p 2566 (2021) Sensors, 21(7):2566. MDPI AG |
| ISSN: | 1424-8220 |
| DOI: | 10.3390/s21072566 |
| Popis: | We present a novel analysis of gas damping in capacitive MEMS transducers that is based on a simple analytical model, assisted by Monte-Carlo simulations performed in Molflow+ to obtain an estimate for the geometry dependent gas diffusion time. This combination provides results with minimal computational expense and through freely available software, as well as insight into how the gas damping depends on the transducer geometry in the molecular flow regime. The results can be used to predict damping for arbitrary gas mixtures. The analysis was verified by experimental results for both air and helium atmospheres and matches these data to within 15% over a wide range of pressures. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|