LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging
| Autor: | Kazim Gorgulu, Ali Kemal Okyay, Zulkarneyn Sisman, Mahmud Yusuf Tanrikulu, Muhammet Poyraz |
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| Přispěvatelé: | Okyay, Ali Kemal |
| Rok vydání: | 2017 |
| Předmět: |
Atoms
Absorption co-efficient Micro-bolometers Materials science Infrared imaging Noise-equivalent temperature Long-wave infrared regimes 01 natural sciences law.invention Atomic layer deposition Time constants law Zinc oxide Temperature sensors Uncooled infrared imaging Deposition Absorption (electromagnetic radiation) Infrared radiation Thermal simulations business.industry Bilayer 010401 analytical chemistry Bolometer General Engineering Microbolometer Molar absorptivity Microbolometers Bolometers Atomic and Molecular Physics and Optics Bi-layer structure 0104 chemical sciences Single-layer structure Thermography (imaging) Optoelectronics business Layer (electronics) |
| Zdroj: | Optical Engineering |
| ISSN: | 0091-3286 |
| DOI: | 10.1117/1.oe.56.3.037106 |
| Popis: | We propose an all-ZnO bilayer microbolometer, operating in the long-wave infrared regime that can be implemented by consecutive atomic layer deposition growth steps. Bilayer design of the bolometer provides very high absorption coefficients compared to the same thickness of a single ZnO layer. High absorptivity of the bilayer structure enables higher performance (lower noise equivalent temperature difference and time constant values) compared to single-layer structure. We observe these results computationally by conducting both optical and thermal simulations. (C) 2017 Society of Photo-Optical Instrumentation Engineers (SPIE) |
| Databáze: | OpenAIRE |
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