(Fe,Mn)3O4 Nanochannels Fabricated by AFM Local-Oxidation Nanolithography using Mo/Poly(methyl methacrylate) Nanomasks
| Autor: | Hidekazu Tanaka, Takuya Matsumoto, Tomoji Kawai, Mizue Ishikawa, Luca Pellegrino, Yoshihiko Yanagisawa |
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| Rok vydání: | 2006 |
| Předmět: |
Materials science
Spintronics Atomic force microscopy Mechanical Engineering chemistry.chemical_element Nanotechnology Local oxidation nanolithography Epitaxy Poly(methyl methacrylate) THIN-FILMS Nanolithography ATOMIC-FORCE MICROSCOPE chemistry MAGNETIC-PROPERTIES Mechanics of Materials Molybdenum visual_art visual_art.visual_art_medium General Materials Science FE3O4 NANOWIRES LITHOGRAPHY Lithography |
| Zdroj: | Advanced materials (Weinh., Print) 18 (2006): 3099–3104. doi:10.1002/adma.200600997 info:cnr-pdr/source/autori:Luca Pellegrino; Yoshihiko Yanagisawa; Mizue Ishikawa; Takuya Matsumoto; Hidekazu Tanaka; Tomoji Kawai/titolo:(Fe,Mn)3O4 Nanochannels Fabricated by AFM Local-Oxidation Nanolithography using Mo%2FPoly(methyl methacrylate) Nanomasks/doi:10.1002%2Fadma.200600997/rivista:Advanced materials (Weinh., Print)/anno:2006/pagina_da:3099/pagina_a:3104/intervallo_pagine:3099–3104/volume:18 |
| ISSN: | 1521-4095 0935-9648 |
| Popis: | Epitaxial (Fe,Mn)(3)O-4 thin films are patterned into nanochannels using molybdenum/poly(methyl methacrylate) (PMMA) nanomasks realized by combining local anodic oxidation of Mo and dry etching of PMMA. Nanostructures on the 100 nm scale can be easily fabricated by subsequent wet chemical etching with H3PO4 (see figure). (Fe,Mn)304 nanochannels open the possibility of fabricating spin-polarized nanocircuits for room-temperature spintronics. |
| Databáze: | OpenAIRE |
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