Laser forming of LTCC ceramics for hot-plate gas sensors
| Autor: | Heiko Thust, Ralf Moos, Frank Rettig, K.-H. Drue, Jaroslaw Kita |
|---|---|
| Předmět: |
Microelectromechanical systems
Beam diameter Materials science Silicon Computer Networks and Communications business.industry Laser cutting Electrical engineering chemistry.chemical_element Laser Electronic Optical and Magnetic Materials law.invention Reliability (semiconductor) chemistry law visual_art visual_art.visual_art_medium Optoelectronics Hot plate Ceramic Electrical and Electronic Engineering business |
| Zdroj: | Scopus-Elsevier |
| Popis: | Hot-plate LTCC gas sensors combine advantages of silicon structures (low power consumption) and typical ceramics gas sensors (stability and reliability). Such elements can be integrated in MEMS packages as well as in ceramic sensor arrays. Moreover, they can be produced in small series with relatively low cost. One important key in hot-plate design are properly formed beams. This paper presents possibilities and problems related to laser forming of LTCC ceramics for hot-plate gas sensors. Influence of beam width on power consumption and temperature distribution is discussed. Possibilities to achieve beam width as narrow as possible are practically tested by laser cutting. Obtained results are very promising for future work and for possible application of LTCC ceramics in such type of gas sensors. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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