Analysis of Macrostep Formation during Top Seeded Solution Growth of 4H-SiC
| Autor: | Kanaparin Ariyawong, J.M. Dedulle, Yun Ji Shin, Didier Chaussende |
|---|---|
| Přispěvatelé: | Laboratoire des matériaux et du génie physique (LMGP ), Institut National Polytechnique de Grenoble (INPG)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Surface (mathematics) Chemistry 02 engineering and technology General Chemistry Mechanics [CHIM.MATE]Chemical Sciences/Material chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics Rotation 01 natural sciences Crystal Physics::Fluid Dynamics Crystallography Flow (mathematics) Phase (matter) 0103 physical sciences Fluid dynamics General Materials Science Seeding 0210 nano-technology Vicinal |
| Zdroj: | Crystal Growth & Design Crystal Growth & Design, American Chemical Society, 2016, 16 (6), pp.3231-3236. ⟨10.1021/acs.cgd.6b00155⟩ |
| ISSN: | 1528-7483 1528-7505 |
| DOI: | 10.1021/acs.cgd.6b00155⟩ |
| Popis: | International audience; We used numerical and analytical modeling to investigate fluid flow behaviors close to the growing 4H-SiC crystal surface in the top seeded solution growth process. First, we calculated the azimuthal and radial components of the fluid flow in front of the rotation disc. Second, we developed an analytical model describing the interaction between the step flow (of the vicinal crystal surface) and fluid flow components, considering the crystallography of 4H-SiC and introducing a phase parameter. The correlation of both models allows us to describe qualitatively the conditions for which macrosteps form and destabilize. This phenomenological description is in good agreement with the corresponding experimental observations that are also presented in this paper. |
| Databáze: | OpenAIRE |
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