Influence of the deposition parameters on the electronic and structural properties of pulsed laser ablation prepared Si1-xCx thin films
| Autor: | Sebastiano Trusso, B. Brendebach, E. Barletta, H. Modrow, Guglielmo Mondio, Fortunato Neri, Francesco Barreca, Enza Fazio |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2007 |
| Předmět: |
Materials science
Analytical chemistry Fluence Pulsed laser deposition Condensed Matter::Materials Science symbols.namesake Ellipsometry Phase (matter) THIN FILMS XPS Deposition (phase transition) FTIR Raman SE XANES Thin Films Thin film COATINGS Surfaces and Interfaces Condensed Matter Physics Surfaces Coatings and Films SILICON CARBON ALLOYS symbols LASER ABLATION Raman spectroscopy |
| Zdroj: | Journal of vacuum science & technology. A. Vacuum, surfaces, and films 25 (2007): 117–125. doi:10.1116/1.2400685 info:cnr-pdr/source/autori:Neri F, Barreca F, Fazio E, Barletta E, Mondio G, Trusso S, Brendebach B, Modrow H/titolo:Influence of the deposition parameters on the electronic and structural properties of pulsed laser ablation prepared Si1-xCx thin films/doi:10.1116%2F1.2400685/rivista:Journal of vacuum science & technology. A. Vacuum, surfaces, and films/anno:2007/pagina_da:117/pagina_a:125/intervallo_pagine:117–125/volume:25 |
| DOI: | 10.1116/1.2400685 |
| Popis: | Si1−xCx thin films have been deposited by pulsed laser ablation of a polycrystalline silicon carbide target in vacuum. The influence of the deposition parameters on the optical and structural properties of the samples was investigated by means of Fourier transform IR, Raman, ex situ ellipsometric, x-ray photoelectron, and x-ray absorption near edge structure spectroscopies. Both deposition temperature and laser fluence were increased up to 1150K and 14J∕cm2, respectively. Increasing the two parameters, a better quality of the thin films was observed due to the existence of a crystalline order on a nanometric scale. Nevertheless, at higher deposition temperatures, a graphitic phase occurred inducing a degradation of the optical properties. Such a phase was not observed increasing the laser fluence. The film formation mechanism has also been qualitatively discussed on the basis of the subplantation model proposed by Lifshitz et al. [Phys. Rev. Lett. 62, 1290 (1989); Phys. Rev. B 41, 1046 (1990)]. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|