Material properties and the influence of metallic catalysts at the surface of highly dense SnO2 films

Autor: Elmar Wagner, W.J Becker, Harald Böttner, M. Jaegle, Jürgen Wöllenstein
Přispěvatelé: Publica
Rok vydání: 2000
Předmět:
Zdroj: Sensors and Actuators B: Chemical. 70:196-202
ISSN: 0925-4005
Popis: We present an approach to optimize the specific response to gases by using specially prepared nanosized platinum on highly dense sputtered polycrystalline SnO 2 . Structural and morphological analyses of the SnO 2 and platinum thin films were performed. Gas measurements were carried out with single chip thin-film SnO 2 sensor arrays on silicon substrates. Pt nanoclusters covering the sensitive layer significantly affect the O 3 , CO and NO 2 sensitivities and the corresponding dynamic response.
Databáze: OpenAIRE