Microscopic three-dimensional topometry with ferroelectric liquid-crystal-on-silicon displays

Autor: Klaus Körner, Jean-Marc Nivet, Klaus-Peter Proll, Hans J. Tiziani
Rok vydání: 2003
Předmět:
Zdroj: Applied optics. 42(10)
ISSN: 1559-128X
Popis: When three-dimensional measurements are conducted with fringe projection, the quality of the grating used for the generation of the fringes is important. It has a direct influence on the achievable depth resolution in a given measurement setup. In the past, Ronchi gratings or gratings written in nematic liquid-crystal displays or in digital micromirror devices have been used. We report on the application of a reflective ferroelectric liquid-crystal-on-silicon display as the fringe-generating element in a setup based on a stereo microscope. With this device the depth resolution of measurements by use of phase-shifting algorithms can be significantly improved compared with the application of a Ronchi grating or a nematic liquid-crystal display.
Databáze: OpenAIRE