Metamorphic HEMT MMICs and Modules Operating Between 300 and 500 GHz

Autor: M. Zink, R. Loesch, Ingmar Kallfass, Matthias Seelmann-Eggebert, Michael Schlechtweg, Arnulf Leuther, Volker Hurm, Hermann Massler, M. Riessle, Oliver Ambacher, Axel Tessmann, M. Kuri
Přispěvatelé: Publica
Rok vydání: 2011
Předmět:
Zdroj: IEEE Journal of Solid-State Circuits. 46:2193-2202
ISSN: 1558-173X
0018-9200
DOI: 10.1109/jssc.2011.2163212
Popis: In this paper, we present the development of submillimeter-wave monolithic integrated circuits (S-MMICs) and modules for use in next-generation sensors and high-data-rate wireless communication systems, operating in the 300-500-GHz frequency regime. A four-stage 460-GHz amplifier MMIC and a 440-GHz class-B frequency doubler circuit have been successfully realized using our 35-nm InAlAs/InGaAs-based metamorphic high-electron mobility transistor (mHEMT) technology in combination with grounded coplanar circuit topology (GCPW). Additionally, a 500-GHz amplifier MMIC was fabricated using a more advanced 20-nm mHEMT technology. To package the submillimeter-wave circuits, a set of waveguide-to-microstrip transitions has been fabricated on both 50-μm-thick quartz and GaAs substrates, covering the frequency range between 220 and 500 GHz. The E-plane probes were integrated in a four-stage 20-nm cascode amplifier circuit to realize a full H -band (220 to 325 GHz) S-MMIC amplifier module with monolithically integrated waveguide transitions.
Databáze: OpenAIRE