Design of a 300-kV gas environmental transmission electron microscope equipped with a cold field emission gun
Autor: | Xiao Feng Zhang, Isao Nagaoki, Nobuhiro Saito, Yoshifumi Taniguchi, Hiroaki Matsumoto, Shigeto Isakozawa, Norio Baba, Akira Watabe, Yasuhira Nagakubo |
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Rok vydání: | 2016 |
Předmět: |
010302 applied physics
Brightness Materials science business.industry Analytical chemistry 02 engineering and technology 021001 nanoscience & nanotechnology Flashing 01 natural sciences Optics Structural Biology Environmental Transmission Electron Microscope 0103 physical sciences Cathode ray Radiology Nuclear Medicine and imaging 0210 nano-technology Field emission gun business Instrumentation |
Zdroj: | Microscopy. 65:353-362 |
ISSN: | 2050-5701 2050-5698 |
Popis: | A new in situ environmental transmission electron microscope (ETEM) was developed based on a 300 kV TEM with a cold field emission gun (CFEG). Particular caution was taken in the ETEM design to assure uncompromised imaging and analytical performance of the TEM. Because of the improved pumping system between the gun and column, the vacuum of CFEG was largely improved and the probe current was sufficiently stabilized to operate without tip flashing for 2-3 h or longer. A high brightness of 2.5 × 10(9) A/cm(2) sr was measured at 300 kV, verifying the high quality of the CFEG electron beam. A specially designed gas injection-heating holder was used in the in situ TEM study at elevated temperatures with or without gas around the TEM specimen. Using this holder in a 10 Pa gas atmosphere and specimen temperatures up to 1000°C, high-resolution ETEM performance and analysis were achieved. |
Databáze: | OpenAIRE |
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