Use of diamond-like carbon films in X-ray optics

Autor: I.S. Smirnov, Alexander Baranov, E.G. Novoselova, Kondrashov Pavel E
Rok vydání: 1997
Předmět:
Zdroj: Scopus-Elsevier
ISSN: 0925-9635
DOI: 10.1016/s0925-9635(96)00680-2
Popis: The possibility to use multilayer structures based entirely on carbon films as reflecting coatings for X-ray optics elements is analyzed. The structures grown by plasma deposition technique contained up to 100 superthin supersmooth layers. It is shown that the X-ray interference can be observed in such structures. Parameters of multilayer structures consisting of superthin carbon layers were calculated for various wavelengths in the soft X-ray range. It is shown that the reflection coefficient of such structures is comparable to that of traditional Me/Me, Me/Si, and Me/C X-ray mirrors but the resolution is greater by a factor of 2–3. Samples of X-ray mirrors were made and their characteristics measured.
Databáze: OpenAIRE