New Volatile Tantalum Imido Precursors with Carboxamide Ligands

Autor: Bo Keun Park, Taek-Mo Chung, Sung Kwang Lee, Sunyoung Shin, Jeong Min Hwang, Hae Sun Kim, Ji Yeon Ryu, Ji-Seoung Jeong, Taeyong Eom, Chang Gyoun Kim
Jazyk: angličtina
Rok vydání: 2021
Předmět:
Zdroj: ACS Omega, Vol 6, Iss 38, Pp 24795-24802 (2021)
ACS Omega
ISSN: 2470-1343
Popis: A series of Ta(V) t Bu-imido/N-alkoxy carboxamide complexes, TaCl2(N t Bu)(pyridine)(edpa) (1), TaCl(N t Bu)(edpa)2 (2), Ta(N t Bu)(edpa)3 (3), TaCl2(N t Bu)(pyridine)(mdpa) (4), and Ta(N t Bu)(mdpa)3 (5), were successfully synthesized by metathesis reactions between Ta(N t Bu)Cl3(py)2 and several equivalents of Na(edpa) (edpaH = N-ethoxy-2,2-dimethylpropanamide) and Na(mdpa) (mdpaH = N-methoxy-2,2-dimethylpropanamide). Furthermore, complexes 3 and 5 were simply transformed to new dimeric structures [Ta(μ2-O)(edpa)3]2 (6) and [Ta(μ2-O)(mdpa)3]2 (7) with the elimination of the N t Bu imido group by air exposure. Compounds 1-7 were characterized by 1H and 13C nuclear magnetic resonance spectroscopy, Fourier transform infrared spectroscopy, elemental analysis, thermogravimetric analysis (TGA), and single-crystal X-ray diffraction. Single-crystal X-ray diffraction analysis revealed that complexes 3 and 5 have a distorted pentagonal bipyramidal geometry around the central Ta atom, with three monoanionic bidentate N-alkoxy carboxamide ligands and one t Bu imido ligand saturating the coordination of tantalum ions. TGA revealed that complexes 3 and 5 had superior thermal characteristics and stability. These complexes could potentially be applied as precursors for tantalum oxide thin films.
Databáze: OpenAIRE