Three-dimensional optical lithography for photonic microstructures

Autor: Jan Scrimgeour, Olivia M. Roche, David N. Sharp, Christopher F. Blanford, Robert G. Denning, Andrew J. Turberfield
Jazyk: angličtina
Rok vydání: 2006
Předmět:
Zdroj: ADVANCED MATERIALS. 18(12)
ISSN: 1521-4095
0935-9648
Popis: A rapid and flexible technique for optical fabrication by creating a device embedded in, and in registration with, a 3D photonic crystal using holographic lithography to define the underlying periodic microstructure was demonstrated. The new optical lithography techniques are intrinsically well adapted to 3D photonic-crystal device fabrication and uses a 3D interface pattern created at the intersection of four laser beams. It has been shown that by imaging the distribution of photo-chemical change induced by a holographic exposure,it is possible to align subsequent two-photon exposures to create device structures embedded in a 3D photonic-crystal lattice. This process has sufficient resolution to create embedded waveguide and microcavity structures by selectively modifying individual unit cells in the bulk of a 3D photonic crystals. The results show that holographic lithography can be combined with direct two-photon laser writing to photonic crystals with 3D structural modifications.
Databáze: OpenAIRE
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