Silicon Nanomembranes with Hybrid Crystal Orientations and Strain States
| Autor: | Mark A. Eriksson, Deborah M. Paskiewicz, Hyuk Ju Ryu, Donald E. Savage, Christoph Deneke, Stefan Baunack, Oliver G. Schmidt, Shelley A. Scott, Angelo Malachias, Max G. Lagally |
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| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Materials science Silicon business.industry chemistry.chemical_element Nanotechnology 02 engineering and technology Substrate (electronics) 021001 nanoscience & nanotechnology Epitaxy 01 natural sciences Characterization (materials science) Crystal Strain engineering Semiconductor Planar chemistry 0103 physical sciences General Materials Science 0210 nano-technology business |
| Zdroj: | ACS applied materialsinterfaces. 9(48) |
| ISSN: | 1944-8252 |
| Popis: | Methods to integrate different crystal orientations, strain states, and compositions of semiconductors in planar and preferably flexible configurations may enable nontraditional sensing-, stimulating-, or communication-device applications. We combine crystalline-silicon nanomembranes, patterning, membrane transfer, and epitaxial growth to demonstrate planar arrays of different orientations and strain states of Si in a single membrane, which is then readily transferable to other substrates, including flexible supports. As examples, regions of Si(001) and Si(110) or strained Si(110) are combined to form a multicomponent, single substrate with high-quality narrow interfaces. We perform extensive structural characterization of all interfaces and measure charge-carrier mobilities in different regions of a 2D quilt. The method is readily extendable to include varying compositions or different classes of materials. |
| Databáze: | OpenAIRE |
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