Electron scattering cross section measurements in a variable pressure scanning electron microscope
| Autor: | Andrew R. Konicek, Scott A. Wight |
|---|---|
| Rok vydání: | 2012 |
| Předmět: |
Argon
Scanning electron microscope Chemistry Scattering General Physics and Astronomy Faraday cup chemistry.chemical_element Cell Biology Inelastic scattering symbols.namesake Cross section (physics) Structural Biology symbols General Materials Science Atomic physics Environmental scanning electron microscope Electron scattering |
| Zdroj: | Micron. 43:985-991 |
| ISSN: | 0968-4328 |
| Popis: | Scattering of the incident electron beam in the variable pressure scanning electron microscope (VPSEM) affects the ability to perform quantitative chemical measurements. However, the manner in which the sum of the elastic and inelastic scattering cross sections varies as a function of gas type and accelerating voltage in the VPSEM is not well understood. A dual Faraday cup was constructed to measure the scattered fraction of the primary beam as a function of gas pressure, working distance, and accelerating voltage in air, water vapor, and argon environments. Experimentally measured values of the scattering cross section agree with previous experimental work, and agree within a factor of two with those values calculated carefully from theory. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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