Diffractive microlenses replicated in fused silica for excimer laser-beam homogenizing
Autor: | Fredrik Nikolajeff, Bernard Curtis, Sverker Hård |
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Rok vydání: | 1997 |
Předmět: |
Materials science
Excimer laser business.industry Materials Science (miscellaneous) medicine.medical_treatment Physics::Optics Replication (microscopy) Industrial and Manufacturing Engineering law.invention Optics law medicine Homogenizer Physics::Atomic Physics Business and International Management Reactive-ion etching business Beam homogenizer Lithography Beam (structure) Intensity (heat transfer) |
Zdroj: | Applied Optics. 36:8481 |
ISSN: | 1539-4522 0003-6935 |
DOI: | 10.1364/ao.36.008481 |
Popis: | A diffractive beam homogenizer, based on an array of square, off-axis, continuous-relief diffractive microlenses, for use with an excimer laser has been studied. We originally fabricated the homogenizer by direct-write electron-beam lithography, from which we made replicas in UV-grade fused silica by hot embossing and reactive ion etching. Atomic force microscopy measurements of original and replicated elements showed the accuracy of the replication fidelity. One of the replicated homogenizers was evaluated together with a KrF excimer laser. The homogenized beam had a flat-top profile with 31% of the beam energy contained within an area where the beam intensity was above a threshold level of 90% of the maximum intensity. |
Databáze: | OpenAIRE |
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