Evaluation of sample temperature and applied power on degradation of stearic acid in inductively coupled radio frequency plasma
| Autor: | Euclides Alexandre Bernardelli, Paulo Roberto de Oliveira, Thierry Belmonte, Marcio Mafra, Paulo César Borges, José Carlos Bianchi, Carlos Eduardo Farias |
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| Jazyk: | angličtina |
| Rok vydání: | 2014 |
| Předmět: |
Materials science
Plasma cleaning plasma cleaning Mechanical Engineering Analytical chemistry Infrared spectroscopy stearic acid Condensed Matter Physics Characterization (materials science) chemistry.chemical_compound chemistry Volume (thermodynamics) Mechanics of Materials Etching TA401-492 Degradation (geology) Molecule etching General Materials Science Stearic acid Materials of engineering and construction. Mechanics of materials |
| Zdroj: | Materials Research, Volume: 17, Issue: 5, Pages: 1251-1259, Published: 21 OCT 2014 Materials Research v.17 n.5 2014 Materials research (São Carlos. Online) Universidade Federal de São Carlos (UFSCAR) instacron:ABM ABC ABPOL Materials Research, Vol 17, Iss 5, Pp 1251-1259 (2014) |
| Popis: | Plasma cleaning is a promising technology in surface treatments, despite technological interest its use is limited because its mechanisms still are not entirely understood. This work aims to evaluate how the applied power of an inductively coupled RF discharge at 13,56 MHz, with Ar and Ar+10%O2 atmospheres, affects its capabilities to etch an organic molecule. Mass variation rate was used as direct characterization of degradation process and attenuated total reflection-Fourier transform infrared spectroscopy (ATR-FTIR) was performed to search for residual molecular modifications. Additionally, optical emission spectroscopy (OES) measurements were performed to monitor the offer of active species in the gaseous volume. In experimental conditions was possible attain mass reduction from sample, with higher mass loss rate when applied power is increased. Material characterization shows the possibility of attain a high etch rate, while no structural modifications were detected, if the temperature is controlled. |
| Databáze: | OpenAIRE |
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