Electron-beam recording of surface structures on As-S-Se chalcogenide thin films
| Autor: | V. Komanicky, Oleg Shylenko, V. Bilanych, L. Revutska, Alexander V. Stronski |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2020 |
| Předmět: |
Materials science
Nanostructure Chalcogenide Physics::Medical Physics chalcogenide thin films Condensed Matter Physics Molecular physics lcsh:QC1-999 Amorphous solid electron beam irradiation chemistry.chemical_compound Condensed Matter::Materials Science chemistry Condensed Matter::Superconductivity Cathode ray Electron beam processing General Materials Science Irradiation Physical and Theoretical Chemistry Thin film Penetration depth lcsh:Physics surface nanostructures |
| Zdroj: | Фізика і хімія твердого тіла, Vol 21, Iss 1, Pp 146-150 (2020) |
| ISSN: | 2309-8589 1729-4428 |
| Popis: | The effect of electron beam irradiation on the amorphous chalcogenide film As38S36Se26 was studied. The formation of cones with a Gaussian profile on the surfaces of the films was found after local electron irradiation. Exposition dependent evolution of height surface nanostructures has been detected. The dependence of the height of surface nanostructures on the dose of irradiation is analyzed. Charge accumulation model into interaction region between the film and the electron beam was used to explain the electron-induced phenomena of the surface structure of amorphous As38S36Se26 films. Charges relaxation times, and electron beam penetration depth into film, and the initial and inverse doses are determined. |
| Databáze: | OpenAIRE |
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