Multilayer optics for coherent EUV/X-ray laser sources
| Autor: | Ch. Bourassin-Bouchet, S. de Rossi, F. Delmotte, Arnaud Jérôme, Françoise Varniere, Evgueni Meltchakov, M. Dehlinger |
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| Přispěvatelé: | Laboratoire Charles Fabry / Optique XUV, Laboratoire Charles Fabry (LCF), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS) |
| Rok vydání: | 2015 |
| Předmět: |
[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]
Materials science business.industry Extreme ultraviolet lithography chemistry.chemical_element 02 engineering and technology Boron carbide Sputter deposition 021001 nanoscience & nanotechnology 01 natural sciences 010309 optics X-ray laser chemistry.chemical_compound Optics chemistry Extreme ultraviolet 0103 physical sciences [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] Silicon carbide Optoelectronics Scandium 0210 nano-technology business Spectral purity |
| Zdroj: | Proc. SPIE SPIE Optical Engineering + Applications, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI SPIE Optical Engineering + Applications, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI, Aug 2015, San Diego, United States. pp.958907, ⟨10.1117/12.2188048⟩ |
| ISSN: | 0277-786X |
| Popis: | International audience; After a brief review of recent results achieved at Laboratoire Charles Fabry concerning high reflectivity mirrors, mirrors with enhanced spectral purity and broadband mirrors, we describe a new approach to design high efficiency multilayer mirrors for application on a broad spectral range. The main idea is to use 2 “spacer” materials (Aluminum and Scandium) in combination with a third material (Boron carbide or Silicon Carbide). We present several examples of design optimization using such multilayers. Finally, we show the first preliminary experimental results with Al/Sc/B4C and Al/Sc/SiC multilayers deposited by ion beam sputtering. |
| Databáze: | OpenAIRE |
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