Experimental procedure to design stressed HBAR devices when the third-order elastic constants are not known

Autor:	Baron Thomas, Bebon Ludovic, Martin Gilles, Petrini Valerie, Lesage Jean-Marc, Dulmet Bernard
Přispěvatelé:	Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Délégation générale de l'armement (DGA), Ministère de la Défense
Rok vydání:	2016
Předmět:	[SPI.OTHER]Engineering Sciences [physics]/Other Physics Computation Acoustics Mathematical analysis 01 natural sciences Vibration Stress (mechanics) Third order Resonator Experimental uncertainty analysis 0103 physical sciences Sensitivity (control systems) Constant (mathematics) 010301 acoustics
Zdroj:	European Frequency and Time Forum European Frequency and Time Forum, Apr 2016, York, United Kingdom
DOI:	10.1109/eftf.2016.7477805
Popis:	International audience; Vibration sensitivity is an important specification for oscillators dedicated to space or airborne systems. For some crystallographic material, some physical constant are not yet measured. So, computation of stress coefficients of frequency is not possible. This paper presents a simple experimentation which allows the determination of the six stress coefficients of frequency for each high-overtone bulk acoustic resonators configuration. The first three coefficient are sαmn are -2.9×10-12/Pa, 4.3×10-10/Pa and 9.4×10-11/Pa. The relative standard deviation can be high due to experimental uncertainty.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d62774e8c400c5b38d0eb947bcc54e0e https://doi.org/10.1109/eftf.2016.7477805 Zobrazit plný text záznamu