Flexible PZT thin film tactile sensor for biomedical monitoring
| Autor: | Wei-Cheng Tian, Hong-Jie Tseng, Wen-Jong Wu |
|---|---|
| Rok vydání: | 2013 |
| Předmět: |
Silicon
Fabrication Materials science Pulse Wave Analysis Annealing (metallurgy) Systole Biomedical Technology lcsh:Chemical technology Biochemistry biomedical Article Analytical Chemistry Electricity PZT thin-film sol-gel sensor Diastole medicine.artery medicine Waveform Humans lcsh:TP1-1185 Electrical and Electronic Engineering Thin film Radial artery Pliability Pulse Instrumentation Pulse wave velocity Monitoring Physiologic Titanium Stainless Steel Atomic and Molecular Physics and Optics Lead Touch Polyvinyls Zirconium Crystallization Tactile sensor Biomedical engineering |
| Zdroj: | Sensors (Basel, Switzerland) Sensors; Volume 13; Issue 5; Pages: 5478-5492 Sensors, Vol 13, Iss 5, Pp 5478-5492 (2013) |
| ISSN: | 1424-8220 |
| Popis: | This paper presents the development of tactile sensors using the sol-gel process to deposit a PZT thin-film from 250 nm to 1 μm on a flexible stainless steel substrate. The PZT thin-film tactile sensor can be used to measure human pulses from several areas, including carotid, brachial, finger, ankle, radial artery, and the apical region. Flexible PZT tactile sensors can overcome the diverse topology of various human regions and sense the corresponding signals from human bodies. The measured arterial pulse waveform can be used to diagnose hypertension and cardiac failure in patients. The proposed sensors have several advantages, such as flexibility, reliability, high strain, low cost, simple fabrication, and low temperature processing. The PZT thin-film deposition process includes a pyrolysis process at 150 °C/500 °C for 10/5 min, followed by an annealing process at 650 °C for 10 min. Finally, the consistent pulse wave velocity (PWV) was demonstrated based on human pulse measurements from apical to radial, brachial to radial, and radial to ankle. It is characterized that the sensitivity of our PZT-based tactile sensor was approximately 0.798 mV/g. |
| Databáze: | OpenAIRE |
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