Laser-induced fast etching and metallization of SiC ceramics
| Autor: | Wladimir Marine, J.-M Themlin, C. Fauquet-Ben Ammar, S.I. Dolgaev, Valerii V Voronov, George A. Shafeev, A Cros |
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| Rok vydání: | 1997 |
| Předmět: |
Copper vapor laser
Materials science Scanning electron microscope General Physics and Astronomy Mineralogy Surfaces and Interfaces General Chemistry Condensed Matter Physics Surfaces Coatings and Films Amorphous solid X-ray photoelectron spectroscopy Etching (microfabrication) visual_art visual_art.visual_art_medium Ceramic Irradiation Composite material Layer (electronics) |
| Zdroj: | Scopus-Elsevier |
| ISSN: | 0169-4332 |
| DOI: | 10.1016/s0169-4332(96)00634-4 |
| Popis: | Experimental results on the etching of SiC ceramics induced by a copper vapor laser in various environments (air, (CH3)2SO (DMSO), N2H4, H2O) are presented. Strongly non-equilibrium conditions of the etching process result in the decomposition of the SiC ceramics surface. XPS and X-ray diffractometry reveal the following layered structure of SiC ceramics etched in air: an amorphous oxide layer SiOx, a several μm thick layer of Si clusters with an average size of 300 A, and a partially amorphous underlying layer of SiC. The areas of SiC ceramics etched in liquid environment do not contain any debris. SiC ceramics etched in air and in N2H4 promotes the electroless deposition of both Ni and Cu from corresponding electroless solutions resulting in the selective metallization of irradiated areas. Unoxidized Si species are the catalytic centers responsible for the initiation of metal deposition. The effects of the surrounding medium on the morphology of the etched area observed by scanning electron microscopy and atomic force microscopy are discussed. |
| Databáze: | OpenAIRE |
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